Rendering

Component: (Network and Table)
Network
00090 - Document - Document And Entity Information
(http://www.cmicro.com/2010-09-30/role/DocumentDocumentAndEntityInformation)
Table(Implied)
Slicers (applies to each fact value in each table cell)
Document And Entity Information [Abstract]Period [Axis]
2011-01-01 - 2011-12-31
2012-03-05
2011-06-30
Document And Entity Information [Abstract]
 
 
 
Document Type
10-K 
 
 
Amendment Flag
false 
 
 
Document Period End Date
2011-12-31 
 
 
Document Fiscal Year Focus
2011 
 
 
Document Fiscal Period Focus
FY 
 
 
Entity Registrant Name
CASCADE MICROTECH INC 
 
 
Entity Central Index Key
0000864559 
 
 
Current Fiscal Year End Date
--12-31 
 
 
Entity Filer Category
Smaller Reporting Company 
 
 
Entity Common Stock, Shares Outstanding
 
14,195,723  
 
Entity Voluntary Filers
No 
 
 
Entity Well-known Seasoned Issuer
No 
 
 
Entity Current Reporting Status
Yes 
 
 
Entity Public Float
 
 
55,164,624