| Component: (Network and Table) | |
|---|---|
| Network | 2325301 - Disclosure - Long-term Debt (Tables) (http://www.amtechsystems.com/role/LongTermDebtTables) |
| Table | (Implied) |
| Reporting Entity [Axis] | 0000720500 (http://www.sec.gov/CIK) |
| Debt Disclosure [Abstract] | Period [Axis] | ||||||||||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
2015-10-01 - 2016-09-30 | |||||||||||||||||||||||||||||||||||||||||||||
Debt Disclosure [Abstract] | |||||||||||||||||||||||||||||||||||||||||||||
Schedule of Maturities of Long-term Debt | Annual maturities relating to the Company's long-term debt as of September 30, 2016 are as follows:
| ||||||||||||||||||||||||||||||||||||||||||||