| Component: (Network and Table) | |
|---|---|
| Network | 090500 - Disclosure - INVENTORIES (Details) (http://cabotcmp.com/role/InventoriesDetails) |
| Table | (Implied) |
| Reporting Entity [Axis] | 0001102934 (http://www.sec.gov/CIK) |
| INVENTORIES [Abstract] | Period [Axis] | |
|---|---|---|
2016-09-30 | 2015-09-30 | |
INVENTORIES [Abstract] | ||
Raw materials | ||
Work in process | ||
Finished goods | ||
Total | 72,123,000 | 70,678,000 |