| Component: (Network and Table) | |
|---|---|
| Network | 40601 - Disclosure - Accounts Receivable, net (Details) (http://www.axcelis.com/role/DisclosureAccountsReceivableNetDetails) |
| Table | (Implied) |
| Reporting Entity [Axis] | 0001113232 (http://www.sec.gov/CIK) |
| Accounts Receivable, net | Period [Axis] | |
|---|---|---|
2016-12-31 | 2015-12-31 | |
Accounts Receivable, net | ||
Trade receivables | ||
Allowance for doubtful accounts | ( | |
Trade receivable, net | 50,573,000 | 36,868,000 |